Ultrapure Water Micro

June 7, 2016 - June 8, 2016

Location: Austin, TX

UPW Micro explores the latest trends in the microelectronics industry. From high-purity water to wastewater management, UPW Micro covers every aspect of water for microelectronics. For more information, visit http://www.ultrapurewatermicro.com.

Areas of focus in 2016 include:

Ultrapure Water

  • ITRS/SEMI development
  • UPW technology needs
  • Particles management/control
  • H2O2 monitoring & control
  • Particles monitoring development
  • UPW materials improvements
  • Point of use treatment
  • TOC / organics & speciation
  • Metallics in UPW process
  • Cost reductions
  • Continuous improvement
  • Bacteria detection

Water Management

  • Dilute Sulfuric treatment
  • TDS reduction
  • Reclamation & reuse challenges
  • New chemistry challenges
  • Limit pathway & impact
  • EPA-TCEQ-POTW & semiconductors
  • Reutilizing equipment for reuse
  • Organics control
  • H2SO4, salinity & environmental compliance
  • Monitoring issues
  • Cu waste management
  • Water quality for cooling towers
  • Role of cooling towers in water management
  • Industry needs, key challenges and known issues.
  • Contamination monitoring and management

Image by Burnham RNG, courtesy twentytwo & brand.