Ultrapure Water Micro

Location: Austin, TX

UPW Micro explores the latest trends in the microelectronics industry. From high-purity water to wastewater management, UPW Micro covers every aspect of water for microelectronics. For more information, visit http://www.ultrapurewatermicro.com.

Areas of focus in 2016 include:

Ultrapure Water

• ITRS/SEMI development
• UPW technology needs
• Particles management/control
• H2O2 monitoring & control
• Particles monitoring development
• UPW materials improvements
• Point of use treatment
• TOC / organics & speciation
• Metallics in UPW process
• Cost reductions
• Continuous improvement
• Bacteria detection

Water Management

• Dilute Sulfuric treatment
• TDS reduction
• Reclamation & reuse challenges
• New chemistry challenges
• Limit pathway & impact
• EPA-TCEQ-POTW & semiconductors
• Reutilizing equipment for reuse
• Organics control
• H2SO4, salinity & environmental compliance
• Monitoring issues
• Cu waste management
• Water quality for cooling towers
• Role of cooling towers in water management
• Industry needs, key challenges and known issues.
• Contamination monitoring and management