Location: Austin, TX
UPW Micro explores the latest trends in the microelectronics industry. From high-purity water to wastewater management, UPW Micro covers every aspect of water for microelectronics. For more information, visit http://www.ultrapurewatermicro.com.
Areas of focus in 2016 include:
Ultrapure Water
- ITRS/SEMI development
- UPW technology needs
- Particles management/control
- H2O2 monitoring & control
- Particles monitoring development
- UPW materials improvements
- Point of use treatment
- TOC / organics & speciation
- Metallics in UPW process
- Cost reductions
- Continuous improvement
- Bacteria detection
Water Management
- Dilute Sulfuric treatment
- TDS reduction
- Reclamation & reuse challenges
- New chemistry challenges
- Limit pathway & impact
- EPA-TCEQ-POTW & semiconductors
- Reutilizing equipment for reuse
- Organics control
- H2SO4, salinity & environmental compliance
- Monitoring issues
- Cu waste management
- Water quality for cooling towers
- Role of cooling towers in water management
- Industry needs, key challenges and known issues.
- Contamination monitoring and management
